Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer...

Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro-...

the resolution attainable through photolithography. Computational lithography came to the forefront of photolithography technologies in 2008 when the semiconductor...

in 1984. ASML specializes in the development and manufacturing of photolithography machines which are used to produce computer chips. As of 2023[update]...

shine through in a defined pattern. Photomasks are commonly used in photolithography for the production of integrated circuits (ICs or "chips") to produce...

created by a photographic process, a method that may be referred to as "photolithography" (although the term usually refers to a vaguely similar microelectronics...

resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This...

need for costly vacuum chambers. Significant examples include 193-nm photolithography equipment (for semiconductor manufacturing) and circular dichroism...

(EGS) or other semiconductor (such as GaAs) through processes such as photolithography. The wafer is cut (diced) into many pieces, each containing one copy...

the 1960s, excimer lasers have been widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic...