Lithography (from Ancient Greek λίθος (líthos) 'stone', and γράφω (gráphō) 'to write') is a planographic method of printing originally based on the immiscibility...

shortened to ASML, originally standing for Advanced Semiconductor Materials Lithography) is a Dutch multinational corporation founded in 1984. ASML specializes...

Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer...

Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a new technology used in the semiconductor industry for manufacturing integrated circuits...

Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask...

Maskless lithography (MPL) is a photomask-less photolithography-like technology used to project or focal-spot write the image pattern onto a chemical...

Electron-beam lithography (often abbreviated as e-beam lithography or EBL) is the practice of scanning a focused beam of electrons to draw custom shapes...

Nanoimprint lithography (NIL) is a method of fabricating nanometer-scale patterns. It is a simple nanolithography process with low cost, high throughput...

Immersion lithography is a technique used in semiconductor manufacturing to enhance the resolution and accuracy of the lithographic process. It involves...

Interference lithography (or holographic lithography) is a technique for patterning regular arrays of fine features, without the use of complex optical...